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Reactive-ion etching
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11	FLARION Series Plasma Reactors The FLARION series plasma reactors are custom designed for plasma-enhanced chemical vapour deposition (PECVD), plasma etching (PE), reactive or deep reactive ion etching (RIE, DRIE), or su Add to Reading List Source URL: www.plasmionique.com Language: English - Date: 2016-05-17 17:54:17
12	Tin removal from extreme ultraviolet collector optics by inductively coupled plasma reactive ion etching H. Shin,a兲 S. N. Srivastava, and D. N. Ruzicb兲 Center for Plasma Material Interactions, University of Illinois Add to Reading List Source URL: cpmi.illinois.edu Language: English - Date: 2015-04-22 08:46:31
13	Dry EtchOct2011.qxp:44 AM Add to Reading List Source URL: www.mksinst.com Language: English - Date: 2011-10-14 10:04:12 Technology Etching Reactive-ion etching Isotropy Microelectromechanical systems Dry etching Semiconductor device fabrication Microtechnology Materials science
14	International Journal of Pharmacy and Pharmaceutical Sciences ISSNVol 3, Suppl 1, 2011 Full Proceeding Paper Add to Reading List Source URL: www.ijppsjournal.com Language: English - Date: 2014-07-14 06:02:01 Technology Nanotechnology Etching Microfluidics Microfabrication Photoresist Industrial etching Polydimethylsiloxane Deep reactive-ion etching Materials science Microtechnology Semiconductor device fabrication
15	Figure 4 Advantage of having smaller focal spot on CCD with super-fine pixels: Larger focal point compromises the sensitivity, spatial resolution, and accuracy. Figure 1 Typical microlens array for Shack-Hartmann Sensor Add to Reading List Source URL: www-bsac.eecs.berkeley.edu Language: English - Date: 2004-09-20 14:57:04 Technology Microlens Microelectromechanical systems Integral imaging Lens Deep reactive-ion etching Microtechnology Materials science Optics
16	DISASTER RECOVERY INFORMATION EXCHANGE CENTRAL CHAPTER The Disaster Recovery Information Exchange (DRIE) Central has been providing a professional forum for business continuity and emergency management professionals in M Add to Reading List Source URL: www.driecentral.org Language: English - Date: 2014-04-19 21:08:56 Emergency management Sponsor Business continuity planning Disaster recovery Deep reactive-ion etching Management Business Advertising
17	FRAUNHOFER INSTITUTE FOR RELIABILITY AND MICROINTEGRATION IZM WAFER LEVEL MEMS PACKAGING 3D wafer level system integration is one sealed by bonding of a cap wafer onto Add to Reading List Source URL: www.izm.fraunhofer.de Language: English - Date: 2013-01-18 04:24:22 Technology Electronics manufacturing Chemical bonding Wafer bonding Microelectromechanical systems Deep reactive-ion etching Wafer Through-silicon via EV Group Semiconductor device fabrication Materials science Microtechnology
18	Characterization of deep wet etching of fused silica glass for single cell and optical sensor deposition Add to Reading List Source URL: cancer-insights.asu.edu Language: English - Date: 2010-04-06 17:14:23 Chemistry Technology Etching Microfabrication Industrial etching Fused quartz Photoresist Reactive-ion etching Wafer Materials science Microtechnology Semiconductor device fabrication
19	Biogeosciences Discussions Correspondence to: Y. Crombet () Published by Copernicus Publications on behalf of the European Geosciences Union. Add to Reading List Source URL: www.biogeosciences-discuss.net Language: English - Date: 2014-12-04 09:53:30 Planktology Biology Oceanography Marine biology Oligotroph Biogenic silica Plankton Deep reactive-ion etching Mediterranean sea Water Aquatic ecology Biological oceanography
20	IonEtch Sputter Ion Gun, GenII The tectra IonEtch ion gun is a filamentless ion source based on a microwave plasma discharge. The IonEtch works by coupling microwave energy into a coaxial waveguide and from there via eva Add to Reading List Source URL: www.tectra.de Language: English - Date: 2010-10-02 06:51:58 Ions Matter Semiconductor device fabrication Plasma physics Ion source Plasma Reactive-ion etching Ion gun Sputtering Chemistry Physics Plasma processing

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